PVA BRUSH
Optimal Solution for Controlling Contamination Defects in Semiconductor Wafers
Product Introduction
PVA BRUSH
PVA BRUSH
In the semiconductor industry, where no impurity can be tolerated, addressing contamination defects that occur after the CMP process is crucial for yield improvement. At the heart of this solution is the functional PURIENCE PVA Brush.
Product Brochure
PVA Brush Features
High elasticity when wetted
Capability to manufacture various brush shapes
Adjustable pore size
Excellent mechanical properties and wear resistance
Strong resistance to sunlight and UV radiation
Heat resistance up to 80°C in wet conditions and 120°C in dry conditions
No dust generation
Absorbs 12–18 times its weight in moisture
Pores connected in an open-cell structure
PVA Brush Specifications
품번
Part Number
Spec
TC70-MA31-H218
PURIENCE_70-31_BRUSH_AMAT
70mm X 31mm X 218mm
TC60-OD32-H254
PURIENCE_60-32_BRUSH_LAM
60mm X 32mm X 254mm
TC38-EP18-H218
PURIENCE_38-18_BRUSH_EBARA
38mm X 18mm X 218mm
TC60-OD32-H254
PURIENCE_38-18_BRUSH_EBARA0
38mm X 18mm X 218mm
TC38-EP18-H218
PURIENCE_300A_CONNECTED_BRUSH_AMAT
70mm X 31mm X 318mm
Physical Properties
Specifications
200MM(8inch)
300MM(12inch)
Image
Average Pore Size (µm)
25㎛,96㎛
80㎛
Porosity (%)
88-90%
90%
Moisture Absorption Rate (%)
700-1100%
817%
porosity
1.2436g/cm3
1.3016g/cm3
Chemical Resistance
Chemical
Consertration
Chemical
Concentration
Acetic acid
TC70-MA31-H218
PURIENCE_70-31_BRUSH_AMAT
70mm X 31mm X 218mm
Acetone
TC60-OD32-H254
PURIENCE_60-32_BRUSH_LAM
60mm X 32mm X 254mm
Ammonium hydroxide
TC38-FR18-H218
PURIENCE_38-18_BRUSH_EBARA
38mm X 18mm X 218mm
Citric acid
TC38-EP18-H218
PURIENCE_38-18_BRUSH_EBARA0
38mm X 18mm X 218mm
EDTA
TC38-EP18-H218
PURIENCE_300A_CONNECTED_BRUSH_AMAT
70mm X 31mm X 318mm
Ethanol
TC38-EP18-H218
PURIENCE_300A_CONNECTED_BRUSH_AMAT
60mm X 32mm X 254mm
Hydrochloric acid
TC38-EP18-H218
PURIENCE_300A_CONNECTED_BRUSH_AMAT
38mm X 18mm X 218mm
Hydrofluoric acid
TC38-EP18-H218
PURIENCE_300A_CONNECTED_BRUSH_AMAT
38mm X 18mm X 218mm
Hydrogen peroxide
TC38-EP18-H218
PURIENCE_300A_CONNECTED_BRUSH_AMAT
70mm X 31mm X 318mm
Contamination (Metal/IonContamination)
Ion
Concentration(ppb)
Br-
<0.5
Cl-
<0.5
F-
<0.5
NO3-
<0.5
Br-
<0.5
Cl-
<0.5
F-
<0.5
NO3-
<0.5
Br-
<0.5
Cl-
<0.5
F-
<0.5
NO3-
<0.5
Ion
Concentration(ppb)
Br-
<0.5
Cl-
<0.5
F-
<0.5
NO3-
<0.5
Br-
<0.5
Cl-
<0.5
F-
<0.5
NO3-
<0.5
Br-
<0.5
Cl-
<0.5
F-
<0.5
NO3-
<0.5